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[Table Adjustment] Georgia Tech Microelectronics Research Center
CMOS as a Research Platform
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Seminar notes
  • Z. Zhou, M. Leidy, "CMOS-Clean Processing and CMOS/MEMS Wet Benches Guidelines at MiRC", February 8, 2005. [PDF]
  • D. Brown, "Metal Deposition", November 11, 2003. [PDF]
  • E. Woods, "Plasma Etching", October 14, 2003. [PDF]
  • E. Woods, "Plasma Deposition", October 7, 2003. [PDF]
  • Z. Zhou, "Photolithography and Mask Creation at MiRC", September 30, 2003. [PDF]
  • David F. Ballard, "Hazard Communications", September 19, 2002. [PDF]
  • Z. Zhou, "CMOS as a Research Platform Progress Report", September 5, 2002. [PDF]
  • Brian J. Polk, "Chemical Safety Refresher", March 15, 2002. [PDF]
  • Gary Spinner, "Chemical Storage and Disposal Procedures", March 15, 2002. [PDF]
  • Z. Zhou, "Photolithography and Mask Creation at MiRC", February 5, 2002. [PDF]
  • Z. Zhou, "CMOS Baseline Operation at MiRC", August 30, 2001. [PDF]


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