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Georgia Tech Microelectronics Research CenterCMOS as a Research Platform
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| Cleaning |
| PIRANHA |
| Furnace |
| ANNEAL2.005 |
| CAPOX.067 |
| CMOSPOLY.008 |
| DENS.003 |
| FIELDOX2.003 |
| GATEOX.067 |
| INIOX.003 |
| KOOI2.067 |
| NICMOS.004 |
| NWDRIVE.003 |
| PADOX.003 |
| PYDOPANL.001 |
| PYPREDOP.001 |
| SION.004 |
| Litho |
| MA6-1813 |
| MA6-1827 |
| Plasma |
| CMOSAL |
| CMOSPOLY.BCH |
| CMOS*K.SET |
| Wet Etch |
| NITRIDE.WET |
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This page last modified April 19, 2005 17:11.
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