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Revision 1 - 14-Jan-2002

Verteq SuperClean 1600-55 A/M

The SuperClean 1600-55 A/M is a single cassette, front-loading, programmable rinser/dryer used to rinse and dry semiconductor wafers, photomasks, and substrates up to six inches (150mm) in diameter.

The dryer can run two types of cycles: rinse and dry. The cycles are controlled independently, therefore, a rinse and dry, rinse only, or dry only cycle can be programmed.

Theory of Operation

Verteq’s SuperClean 1600-55 A/M dryer uses centrifugal force to dry the surface of the wafers. A cassette is placed inside the drying chamber, held in place by a rotor, and spun at an appropriate speed depending on the nature of the load and the process. The drying chamber (bowl) is warmed with a continuous flow of hot filtered nitrogen and surface heaters on the outside walls. The liquid on the wafer surface is spun off and drained from the bowl while liquid droplets on the drying chamber surfaces are evaporated.

Control Panel Keys

The keys on the Control Panel are used to program or view recipes and steps. The numerical keys are used to program the recipe, step, cycle duration, rpm, and resistivity level. Several keys have dual functions that are controlled by the SHIFT key. With the SHIFT LED illuminated, the upper functions (displayed in orange) can be programmed. With the SHIFT LED not illuminated, the lower functions can be programmed.

Numeric Keys are used to program the recipe, step, time, rpm, and resistivity values as well as Wash Warning values.

DI H₂O, NITROGEN, HEATER, STATIC, RESIST, WASH, HOURS, CYCLES are displayed in orange on the keypad are used to program the process selections of each cycle. To access these functions, press SHIFT.

RECIPE is used to select a recipe number from 0-9; up to ten recipes can be programmed.

STEP is used to select a step (cycle) number from 0-9; up to ten steps can be programmed.

CANCEL will erase any programming changes made while in the programming mode. Pressing CANCEL, ENTER, ENTER will revert to the recipe (if any) that had existed before any changes were programmed. The CANCEL key will silence the audible alarm, and will also put the dryer in standby mode when system faults (HELP codes) have been cleared.

ENTER is used to exit the programming mode by pressing it twice.

WASH is not used.

HOURS is used to program the Wash Warning parameters. Ensure all four numbers are keyed in. See Section 3.2.1.1, Wash Warning Feature.

CYCLES is used to program the Wash Warning. Ensure all four numbers are keyed in. See Section 3.2.1.1, Wash Warning Feature.

RESIST is used to program the resistivity setpoint. Ensure all three numbers are keyed in.

TIME is used to program the cycle duration and is shown in the TIME display. The time is programmed in seconds (e.g., a two minute cycle is programmed as 0120). Ensure all four numbers are keyed in.

RPM is used to program the speed of the rotor and cassette. The minimum and maximum RPM values are determined by the software version.

SHIFT will illuminate when in shift mode and is used to access the following (orange) keys:

DI H₂O	NITROGEN	HEATER
STATIC	RESIST	WASH
HOURS	CYCLES

NOTE

SHIFT must be off to exit the programming mode.

Description of Main Controls

START is green and will start a cycle. When a cycle has been interrupted, pressing START will restart the run from the beginning of a recipe and not from the point of interruption.

POWER is amber and must be toggled ON to allow the dryer to function. The Control Panel lights will be illuminated when this button is toggled on. There is one pushbutton for each dryer within a stacked configuration.

STOP is red and is used for non-emergency process interruptions. If the dryer is in process, pressing this button will interrupt the process. Processing cannot be restarted for that lot from where it was interrupted. The wafers should be considered under-processed.

NOTE

Buttons 1, 2, and 3 are standard for all dryer configuration types.

Main Power circuit breakers are used for Lockout and tagging procedures. There is one for each dryer in cabinet and frame configurations. Component-Only dryers do not have this feature as a standard. Main power from the facility of each dryer is disconnected when the breaker is in the full down and off position.

EMO is the Emergency Power Off pushbutton. This is optional feature. Power is removed from all dryers downstream of each Main Power circuit breaker.

Control POWER pushbutton supplies power to all dryers downstream of the EMO pushbutton. This feature is not standard on the Component-Only dryer models.

Control Panel displays all programming, standby, fault and operating mode values. This is standard on all model types.

Footswitch is an optional feature which allows operators to toggle the door open or closed with their foot.

Operating Procedures

Wash Warning Feature (Standard)

Your processing requirements may dictate the use of dry cycles only. In this circumstance, the bowl must be rinsed periodically with DI water to ensure a consistently clean operation. The dryer can be programmed to illuminate the WASH LED as a reminder that a rinse cycle is due. The WASH LED can be set to illuminate after a specific number of hours without a rinse cycle or after a specific number of consecutive dry cycles.

If values are set for both hours and cycles, the first to occur will illuminate the warning light. Once a DI water (rinse) cycle is run, the light goes off and the countdown starts over.

NOTE

For HOURS and CYCLES to function, both must be programmed with non-zero values. To set for Cycles only, set Hours to 0000. To set for Hours only, set Cycles to 0000.

To set Wash Warning time and cycle parameters:

Enter 1601.
Press HOURS to clear the TIME display, then enter the desired time up to a maximum of 9999 hours.
Press CYCLES to clear the RPM display, then enter the desired number up to a maximum of 9999 cycles.
Press ENTER ENTER to save the settings and exit Wash Warning programming mode.

AutoWash Feature

An automatic AutoWash feature will run both a rinse and dry cycle. The rinse cycle duration can be programmed to run for up to 9999 seconds. The dry cycle is pre-programmed to run for 600 seconds (10 minutes). Both cycles are pre-programmed to run at 100 rpm.

To program for AutoWash: (Wash Warning also must be enabled)

Enter 1604.
Enter the Passcode. (See Section 3.2.1.4)
Press HOURS to clear the TIME display, then enter the desired time up to a maximum of 9999 seconds.
Press ENTER ENTER to save the settings and exit AutoWash programming mode.

If the dryer is in Idle mode with the door closed and then the WASH LED illuminates, the AutoWash recipe will automatically start. If the WASH LED illuminates during a recipe run, the system waits until the recipe stops and the door is opened and closed before commencing the AutoWash.