Ultratech Model 603 Plate Cleaner The Ultra-Tech plate cleaner can be used to automatically clean photolithography masks.

Features

• automatically cleans masks of a variety of sizes
• capable of dispensing cleaning solution
• full rinse and dry capablilty

Overview

Operating Instructions

1. Remove the clear protective cover from the top of the plate cleaner.
2. Place the mask to be cleaned so that the corners of the mask are in the notches on the rotor. Make sure that the mask is secure. If it is not, it may be thrown off of the rotor and destroyed during cleaning.
3. Set the desired clean time and dry time using the "CLEAN" and "DRY" knobs on the control panel. Bigger numbers will give longer times, but the numbers do not correspond to anything specific. Set the "CLEAN" time to at least four.
4. If you would like a cleaning solution applied to the mask, press the red button on the front of the small white box on the floor next to the plate cleaner. This will spray a cleaning solution onto the mask. As soon as the cleaning solution starts to flow, move the brown cone-shaped cover over the mask. This will start the rotor and the rinse water flow. If you have pressed the button, but nothing is being sprayed on the plate, try pressing the button again once. If there is still nothing coming out, the dispenser is probably out of cleaning solution. Contact MiRC technical staff for assistance. If you do not want to use the cleaning solution, just move the cone-shaped cover over the mask without pressing the red button.
5. When the plate cleaner has stopped spinning, move the brown cover aside and remove the mask from the cleaner.
6. Repeat the cleaning procedure for the other side of the mask.
7. Cover the cleaner with the clear protective lid when you are finished.