Tousimis Supercritical Dryer

Trainers

1. Turn power switch "ON". "ON/OFF" power switch is located on right side panel. Green LED on VENT button will illuminate. This indicates the power is ON and the unit is in standing by the VENT mode.
2. Let the dryer stand for 3-5 minutes. This initial wait period will allow all internally heated plumbing components to "warm-up".
3. Now, press the VENT button once. The VENT LED will begin to blink. This indicates that the VENT solenoid is closed and you may now introduce ultra-pure alcohol into the chamber.
4. At this point, you can fill the chamber with enough alcohol (IPA, Methanol, or Ethanol) to cover your wafer(s) or die.

NEVER EXPOSE CHAMBER TO ANY ACIDS!

5. Carefully and quickly transfer your wafer(s) from your wafer container into the dryer process chamber. For best results, minimize any exposure time to air.
6. Carefully place the chamber lid on top of the chamber. Use your hand to evenly tighten the 6-knurled nuts around the circumference of the chamber lid.
7. Then, use the spanning wrench provided, uniformly tighten each knurl nut in a "Star Pattern". Tighten the knurl nuts in the numbered sequence as shown in the following photo. Repeat this rotation "Star Pattern" sequence until the knurl nuts are unable to tighten further.

9. Once the chamber lid is secured, it is time to set the PURGE timer located to the right of the push button switches. Positions on the purge timer are calibrated at 5- minute intervals. Setting the "purge timer" indicator arrow to the #1 position will give you a 5-minute purge time. The #2 position will give you a 10-minute purge time… Correspondingly, the #9 position will give you the max purge time capable of 45 minutes. The "purge time" setting is best determined by the individual investigator. A general "rule-of-thumb" to follow is the following:

• To purge ¼ chamber full of alcohol=15 minute purge time.

• ½ chamber=20 minute purge time

• ¾ chamber=25 minute purge time

[Please note that actual purge time can vary greatly depending on your sample type
in combination with the FILL and PURGE metering value adjust positions.]

10. After initial warm up, press the COOL button. The COOL LED light will go on, and the Vent light will turn off. As the chamber temperature slowly begins to drop, you will hear the LCO2 circulating through the unit. The 815B will continue cooling by itself until the chamber temperature reaches 0 ú C (±5ºC). At this point, the cooling will automatically stop.
11. Press the FILL button and the 815B will begin to fill the chamber with LCO2 for 8.0 minutes. From this point forward, the Autosamdri-815B will automatically cycle through all the drying sequence steps until the process terminates. During the FILL mode, the COOL function may periodically energize as necessary to maintain the chamber temperature between 0°C - 10°C.
12. After the 8 minute FILL mode expires, the 815B will automatically advance into the PURGE mode. This will be indicated by the illumination of the PURGE LED.
13. At this point of the cycle, the 815B will remain in the PURGE mode for the duration of time pre-set by the operator via the PURGE TIMER. The alcohol coming out of the 815B Chamber Exhaust connect hose will be collected directly into the SOTER™ condenser.
14. Upon Completion of the PURGE mode, the unit will automatically advance into a POST-PURGE-FILL mode in which the chamber fills with LCO2 for an additional 4 minutes. This mode is indicated by both the FILL and PURGE LED’s illumination.
15. Upon completion of the POST-PURGE-FILL mode, the PURGE and FILL LEDs will turn off and the HEAT LED will illuminate. The HEAT mode is the stage in which the samples are carried through the "Critical Point". Both the pressure and temperature will steadily rise.
16. When the chamber pressure reaches and goes beyond 1072psi, it will stabilize in the neighborhood of 1350 psi (± 5% @ 20°C). As the temperature achieves 31ºC, the unit has achieved the "critical point" and this is where the ‘tousimis equilibrium’ 4 minute cycle starts. The HEAT LED will begin to blink for the next 4 minutes indicating your 815B is in the ‘tousimis equilibrium'.
17. At the end of the 4 minutes ‘tousimis equilibrium’ period, the 815B will automatically advance into the BLEED mode. The HEAT LED will stop blinking and the BLEED LED will illuminate.
18. At this point, you can measure the BLEED rate via the Flow Meter supplied, by attaching the Flow Meter to the outlet of the COOL EXHAUST (if desired).

The flow rate should read 45-50 SCFH at the beginning of the BLEED cycle. This setting should yield on average of approximately 100-150psi/min reduction in pressure. This pressure reduction flow rate is the desired decompression rate between 1300 psi-400psi.

19. Between 360-400 psi, the 815B will automatically advance from the BLEED mode into the VENT mode. The BLEED LED will turn off, while the VENT LED will illuminate.
20. It is not necessary to readjust the PURGE-VENT metering valve flow rate. The chamber should then come to atmospheric pressure in approximately 10 minutes.
21. At this point, the chamber lid may be removed by alternatively and evenly loosening all of the knurl nuts using the spanning wrench in a "reverse star pattern".
22. The wafer(s) or chip(s) can then be removed from the chamber for further processing. Seal the chamber with the lid to help keep it clean and moisture free.
23. Turn the 815B power off using the ON/OFF SWITCH located on the right-hand side of the too. You will notice that it will take a few seconds for the VENT LED to turn off. Turn the power strip switch to the OFF position.
24. Turn the power strip power switch into the OFF position when finished processing your samples. This will shut down the power to the condenser as well as prevent the 815B from‘ Powering Up’ inadvertently.