Semitool Spin Rinse Dryer

Trainers

The spin-rinse-dryer is equipped for cleaning four-inch silicon wafers. It spins the wafers and uses deionized water and nitrogen to clean and dry the wafers.

Features

2600 RPM maximum spin speed
resistivity sensor for rinse quality control
supports 4" wafers

Operating Instructions

Loading wafers

Place the wafers to be rinsed in to the wafer cassette. If you are testing the spin rinse dryer and do not want to process any wafers, you may leave the wafer cassette empty, but you must load the wafer cassette into the spin rinse dryer.
Open the spin rinse dryer door and insert the wafer cassette into the rotor with the H-bar towards the back. (See the pictures below.)

Correct - H-bar is facing in. Rotor is balanced correctly. WRONG! - H-bar is facing out. Unit will be seriously damaged.

Close the door. Do not force it.

Caution: The door should close easily. You should not have to push it to make it close. If it does not close easily, see the troubleshooting information below. If you still can't get it to close, contact MiRC cleanroom staff. Attempting to force the door closed may destroy the seal.

Running Process

At this point, you should have already loaded the spin rinse dryer and programmed the controller.

Caution: Do not run the spin rinse dryer empty. You must have a wafer cassette (plastic wafer holder) loaded before running the spin rinse dryer. Read the instructions at the beginning of this section for information on loading the wafer cassette.

Press MODE until the display shows "IDLE."
Press the green START button at the bottom of the machine.
If you need to stop the machine in the middle of the run, press the red STOP button at the bottom of the machine. After it stops, it will display an error message that can be cleared by pressing STOP again.
After the process is done and the rotor has stopped turning you will have to wait a few seconds for the door to unlock before you can open it.
Remove the wafer cassette from the spin rinse dryer and close the door.

Troubleshooting

The door will not close easily

Make sure the machine is on. If the controller is not displaying anything, it isn't on. You can turn it on with the green POWER switch on the controller. If the machine is on and the door will not close, contact MiRC cleanroom staff. Do not force the door closed. You may damage the seal if you do.