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Revision 1 - 1 Dec 1998, David Sigmon
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SCS Spinners
The SCS spin coaters are used to spin samples to provide even coatings
of various materials. The SCS spin coaters are primarily used for
coatings of different polymers. Photoresist coatings are usually done
with the CEE 100CB spinners.
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Features
Operating Instructions
- Place the sample to be coated on the chuck.
- Make sure the spinner is on. It can be turned on with the PWR
button.
- Press the VACUUM button to turn the chuck vacuum on. Make sure
that the sample
is securely fastened to the chuck.
- Set the speed, time, acceleration and deceleration knobs to the desired values. You may need
to experiment some.
- Press START to start the spinner. If you want to stop it
while it is running, press RESET and the spinner will began the
deceleration part of the spin cycle.
- When the spinner is done, turn the vacuum of by pressing the VACUUM button
and remove the sample from the chuck.
If you want to run it again, press RESET, reload it, and restart
it.
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