Plas-Mos Ellipsometer

Trainers

Features

• 632.8 nm He-Ne laser
• simple menu driven software
• extremely short measurement times

Operating Instructions

I. Setup

1. Press Esc until then Engineering Mode menu is displayed. If you are at the Plas-mos logo screen, press "E" for Engineering Mode. If you are prompted for a password, enter "engineer" then press "E" for Engineering Mode.
2. Press "Y" for Physical Parameters.
3. Press F2 to choose the mode (most commonly used modes are n fixed and n float).
4. Press F3 and enter the number of layers you are measuring. (This is probably 1).
5. For each layer, press the number of the layer and enter the parameters for the layer. You can usually use a thickness of zero. The other values are in the ellipsometer manual in the drawer of the ellipsometer table. Use the 632.8nm parameters.
6. Press "S" and enter the parameters for the substrate from the ellipsometer manual.

II. Loading

1. Make sure that the beam shutter (switch on left cylinder) is closed (set to black dot).
2. Place your sample on the sample holder.
3. Open the beam shutter (turn switch to red dot).
4. Use the stage height knob on the base of the ellipsometer to raise or lower the sample so that the beam is directed into the center of the detector (cylinder on the right). Once you have the beam directed into the sensor, adjust the height to maximize the intensity shown on the display at the top of the ellipsometer. If the displayed intensity is too high or too low, use the knob at upper end of the sensor to change the display scale.
5. Use the stage tilt knobs at the base of the stage to maximize the intensity shown on the display at the top of the ellipsometer.

III. Measuring

1. Press Esc until the engineering menu is displayed. Press "S" for Single Point Measurement.
2. Press shift-F2 to set the number of measurements to be made.
3. Press F4 to make the measurements.
4. When the measurement results are displayed, you may press any key to return to the Single Point Measurement screen.

IV. Unloading

1. Close the laser shutter (turn the switch on the left cylinder to the black dot).
2. Remove your sample.