Wyko Noncontact Optical Profilometer Customer service number: (520) 741-1297 Training Videos The Veeco noncontact profilometer uses the phase change of light reflecting from various heights of similar materials to measure the uniformity of a flat surface or the horizontal distance between two adjacent surfaces. Warnings Never change from the 5x to the 50X objective while the objectives are close to the sample. Manually raise the microscope about 2 inches above the sample before switching. Once the desired objective is selected, bring the lens down to just below the working distance. Be sure not to hit the sample with the lens. To focus, raise the objective until the sample comes into focus. Never "focus down". Always lower the objective to inside its working distance while physically looking at the separation distance from the lens to the sample. Then focus by raising the lens. Be aware of how many windows you have open. Every time a different graph (ie line graphs or 3d renderings) is generated a new window will open up. If too many windows are open at once, the computer will freeze.

Controls

Instructions

1. Determining if your sample can be measured.
   For the optical profilometer to measure a vertical change in the surface of your sample, the two materials being measured across must have similiar indexes of refraction. For all questions on the materials you are reading across contact Veeco at the customer service number listed above.
2. Understanding the level of magnification. The magnification of the sample is changed by two methods. The first is by setting the objective to either 5X or 50X. The second method is by changing the field of view, or fov. The choices are .5X, 1X, and 2X. So, the possible levels of magnification range from 2.5X (having the 5X objective and the .5X fov selected) to 100X (the 50X objective and the 2X fov selected).
3. If the software is not open then double click on the desktop icon "vision32".
4. Loading your sample.
   1. Raise the objective until the lens is about 2 inches above the sample platform. Do this by turning the Z control knob counterclock wise while holding the FAST button.
   2. While holding the button on top of the joystick, tilt the joystick away from you. The sample platform will move from under the objective so that you can safely load your sample.
   3. Place your sample in the middle of the sample platform.
   4. While holding the button on top of the joystick, tilt the joystick toward you. Center your sample under the selected objective.
5. If you are measuring a smooth surface with features ranging in height between 160 nm to less than 10 Angstroms, skip to the section marked "PSI Measurement". If you are measuring vertical heights ranging from 160 nm to 1mm then continue reading in the following section titled "VSI Measurement".

VSI Measurement

1. Click on the "set the intensity" button on the top tool bar. This is the button that looks like a miniature sun. This will open the intensity window which will be the main window used for finding and focusing on features to be measured.
2. Click on the "measurement options" button on the top tool bar. It is the button just to the left of the "set the intensity" button.
3. The hardware options box should now be open. Do the following:
   1. In the first screen, choose "VSI" instead of "PSI".
   2. Click on the "STICHING" tab at the top of the box. Make sure that stitching is not enabled.
   3. Click on the "AUTOMATION" tab at the top of the box. Make sure automation is not enabled.
   4. Click on the "OK" button at the bottom of the options box.
4. On the intensity box, choose "hardware" then "filter" then "VSI".
5. Next go to "hardware" then "fov" then ".5X".

PSI Measurement

1. Start instructions here

Troubleshooting

1. If the computer has been thinking (the mouse icon is an hourglass) for a long amount of time with no results, the computer has crashed. This could be caused by have too many windows open at once, or there is not enough memory to render a large 3d drawing. To quit the software, press ctrl-alt-del once at the same time. When the task manager opens, select end task. Once the software window has closed, exit out of the task manager and double click on the desktop icon for the profilometer software.