Nanospec Film Analyzer 3000

Trainers

The Nanospec 3000 is a precise AFT (Automated Film Thickness) Measurement system which measures the thickness of films deposited on various substrates and also the reflectance relative to Silicon.

Features

Measures vertical features from 100Aring up to 0.02mm with a resolution of 50Aring

Supports 4" and 6" wafers

Measures Up to 3 films on Si substrate

Has up to 200 different programs

Measurement time is 3 seconds

Operating Instructions

In the main screen, choose your desired program, then in the measurement screen, enter your sample ID.

Use the knobs under the stage to move the stage to left or right.

Do the reference measurement by moving to dark position, then focus on the reference sample which is a clean bare silicon wafer on the right side of stage. You can repeat this everytime by clicking on 'Ref' button.

Caution: Don't change the microscope settings.

Now Move the sample under the microscope, focus on it and using the 'Meas' button measure the sample. Only the area under the black spot is measured.

The 'Graph' button displays the data list in an interferogram graph.

The 'Fit' is a measure of resolution, it should be less than 0.1 for fine films (like deposited oxide) and less than 5 for porous films (like deposited Polysilicon). If not, you have to ask the mirc staff to edit the program and change the parameters for you.

To quit to main menu, click on 'Calib' button.

If you want to save your data, in the main menu, go to 'Data' menu, select 'Process Last saved Measurement Result', find your program by clicking on 'Search', click on 'Simple data', choose 'Export' from the 'Process' menu and finally 'Save'. For posting your data on the web, select 'e://grover/nanospec'.

Caution: Don't ever turn off the Lamp power supply.