Lindberg Furnaces

Trainers

Overview of Controls

	Gas Flow Timers These timers stop the flow to the flow meters. The maximum time is 12 hours. The orientation of the timers match the orientation of the tubes (ie tube 1 is the top right tube and the top right timer). Note: the timer must be turned to a minimum of 2 hours to function correctly and gas will NOT FLOW if the timer is at 0.
	Flow meters The flow meter valves are located at the bottom of the flow meters. Each flowmeter has two valves. The cutoff valve is the valve closest to the flow meter.The handle at a 90 degree angle from the flow meter is closed and the handle parallel with the flow meter is open. The lower valve is the needle valve (roundhandle) which controls the flow into the flow meter. Turning the round handleclockwise is opening the valve. The needle valve should never be turned all the way open or closed. Over tightening of the valvecould damage it. If you want to turn off the gas flow temporarily, turn off thethe cutoff valve. The far left flow meter is for tube 4, the middle one isfor tube 2 and the right meter is for tube 1. Tube 3 is controlled by the massflow controller located on the wall.
	3-Way valve The 3-way valve controls which gas flows to tube 2. The narrow pointed end of the handle points to the gas being used. In the picture to the left, nitrogenis the selected gas. When you are finished please return the valve to off.
	Temperature Controls The furnace temperature is controlled by a programmable temperature controller. There is onecontroller for each furnace zone.
	Temperature Controller Each furnace zone heater is controller by a programmable temperaturecontroller. The controller allows the programming of several processsteps.

Operating Instructions

1. Set appropriate atmosphere
2. Load furnace
3. Set temperature program
4. Run
5. End run

Setting atmosphere

1. Flow rates for the three furnaces are set by the flow controllers mountedbetween the tubes. The round, black knob sets the flow. The narrow blacklever is a shutoff valve for the gas line.
2. Tube #1 has a flow timer installed. Set the timer to the length of yourrun. This will prevent the waste of gas in the system when the tube sitsidle at the end of the run.
3. Ensure the gas line is connected to the furnace and that gas is flowingeither by sound, feel, or bubbling water (when using the wet oxidationbubbler).

Load Furnace

1. Place samples in quartz boat. Full wafers can be loaded vertically. Partial pieces may need to be placed on horizontal slides in the boat. Useonly the special oxidation boats (located in the N₂ boxes) forwafer oxidation to avoid contamination.
2. Remove the cap from the end of the tube and place the boat just insidethe opening.
3. Use the quartz rod to carefully push the boat to the middle of the furnace tube.
4. Put the cap back on the end of the tube. Do not force it.

Set Temperature Program

Programming is done using three settings for each part of the program."Pr1" is the first ramp rate in °C/min, "PL1" is the first set temperatureyou wish to achieve in °C, and "Pd1" is the delay time at that settemperature in hours. The "1" will increase incrementally as you continuethrough. Controller boxes correspond to the furnace tubes in the samerelative position. To program the controller:

1. Open the black cover below the white arrow keys on the front panel(see diagram) of the central controller to display the "Run/Hold," "REM,"and "P" keys.
2. To initiate programming procedure, press the "P" key and hold until"Pr1" is displayed in the program display. The "P" key must be pressedand held for a small time to enter programming mode. You may see "Pnr1"displayed; depress and press the "P" key once to advance to "Pr1."Programming is done using the three elements: "Prn," "PLn," and "Pdn" foreach step n.
3. With "Pr1" displayed, press the white arrow keys to set the firstdesired ramp rate in °C/min. Holding the arrow keys will increase thespeed with which numbers change. Both the up and down arrow keys can beused. Ramp rate is sign-independent. Direction will be automatically setby the difference between previous set temperature and current settemperature.
4. Now press the "P" key again to display "PL1." Select the desired settemperature in °C using the arrow keys.
5. Press "P" key again to display "Pd1" and set the delay time in hoursat the set temperature using the arrow keys.
6. Press "P" again to display "Pr2." Repeat the steps above for the nextprocess step.
7. To ramp down to room temperature, set "Pln" to 25°C. Set "Pdn" to"END" by pushing the down arrow key until "END" is displayed. You musthave "END" to end all programs. You must have an option to set "Prn" to aset ramp rate which the furnace will attempt to keep, or to the setting"SLEEP." "SLEEP" shows when toggling the ramp rate below zero, and tellsthe controller to allow the furnace to cool by natural convection,however long it takes to the set ending temperature.A sample temperature profile is shown below.
8. Check your program by not touching anything, allowing the controllerto return to rest, and pressing "P" as before to check your settings. Ifyou mess up at some point in programming, you can stop, allow controllerto return to rest, and hit "P" to begin programming again. You cannot gobackwards. Momentarily hitting an arrow key will allow you to check avalue without changing it.

Run

• To run the program, hit the "Run/Hold" key.
• To hold a program, allowing correction settings, hit "Run/Hold" key, and hit again to return to run.
• To abort the program that is running press the up and down arrows at thesame time.

End Run

1. Make sure temperature is about room temperature and program is done."E" will show, signifying end.
2. Remove boat by reversing loading procedure.
3. If you turned gas on, turn it off now.
4. Leave the furnace as you found it.

Eurotherm 847 ControllerOperating Instructions

Programming is done using three settings for each part of the program."r1" is the first ramp rate in °C/min, "L1" is the first set temperatureyou wish to achieve in °C, and "d1" is the delay time at that settemperature in minutes. Note that the other controllers use hours.

• To initiate programming procedure, press the "PAR" key and hold until"Prog" is displayed in the program display. The "PAR" key must be pressedand held for a small time to enter programming mode.
• The name of the parameter being changed is displayed on the top of thedisplay. The current setting is displayed on the bottom.
• Pressing "PAR" while in programming mode will cause the controller todisplay the next parameter. A table showing all of the parameters and theirmeaning is shown below.
• To change the value of a parameter use the up and down arrow buttons.
• If you do not press any button for about five seconds, or if you press"PAR" repeatedly to cycle past the last variable the controllerwill exit programming mode.
• If you press "PAR" too many times and accidently go past the variable youwant to set you must cycle through all of the variables or wait five secondsto exit programming mode. Then press and hold "PAR" again to reenterprogramming mode.
• All processes on the 847 controller must have exactly two ramp periodsand two dwell periods. At the completion of the second dwell step thecontroller will return to room temperature. To run a process that lookssomething like the one below look at the sample values in the table below.If the process needs only one ramp and one dwell step set the second ramprate (r2) to a high value and the second temperature level (L2) to 22°C.

Run

• To run the program, set the "Prog" parameter to "run" using the procedureabove.
• To hold a program, allowing correction settings, set the "Prog" parameterto "hold" and set it back to "run" to return to run.
• To stop the running program, set the "Prog" parameter to "idle". You mayneed to manually return the setpoint to room temperature using the arrow buttons.