EFF Sputter Coater

Trainers

The Ernest Fullum sputter coater is intended for coating SEM (scanning electron microscope) samples with thin layers of gold. It is not intended for other purposes and should not be used for anything other than very thin gold depositions. NOTE: Improper use of the argon flow switch can result in burning out the target.

The EFFA sputter coater accellerates ions of argon into the surface of a gold sputter target. The ions knock gold atoms off of the sputter target and accelerate them toward the sample. The gold atoms are deposited on the sample, forming a thin layer of gold, which will be visible in the SEM.

Sputter coatings for other purposes should be perfomred in the DC or RF sputterer, or metals can be deposited in either of the evaporators.

Instructions

To open the chamber, raise the sputtering gun as far as it will go. Swing it to the right or left and it will stay in the raised position.
Adjust the sample platform so that the sample surface to be coated is 0.75" below the target. The platform may be adjusted by turning it.
Place the sample on the platform. If the sample is very light (foil, paper, etc.), it should be secured to the platform with double-faced tape or a small weight. Otherwise air currents from pumping or venting can blow the sample off the platform. Light-weight ferrous metal samples should also be secured to the platform, as they can jump up and stick to the target, which is highly magnetic.
Place the chamber and sputtering gun over the sample. Re-center the gun, and it will drop down onto the chamber.
Be sure the output knob is zero and the purge valve is closed.
Turn on the argon flow switch located on the front panel. The switch will light up when it is in the on position.
Press the Main switch. It will illuminate and the vacuum pump will start.
Close the bleed valve so that a minimum pressure is obtained. Then open the valve to flood the chamber with argon. Repeat this procedure two or three times before stabilizing the argon at 200.
The red pilot light in the upper left corner of the timer should be on. It will come on at 800-1,000 and signals the enabling of the high voltage.
Set the timer to the desired coating time by turning the round knob.
Press the small toggle switch at the right upwards to the "Start" position and release it. The toggle will return to the center position and the timer will start. At the same time the output power will energize and the pilot light in the upper right corner of the timer will blink on and off.
Turn the output knob up until the glow discharge starts. Observe the milliammeter. The output can be adjusted to any level up to 200 mA.
To stop the coating before the timer has run out, press the toggle switch to the "Stop" position and release it. It will again return to center but the output will be switched off and the timer will stop. The blinking pilot light will be off, but the high voltage enabling light will remain lit as long as the chamber is under vacuum. Press the toggle up to start another coating cycle. The timer will re-start at its set time. It will not use up the time remaining from a previous unfinished cycle.
When the timer runs out, it will shut off the output. The blinking light will go out and the milliammeter will drop to zero. Press the Main switch again to stop the pump.
Turn the argon flow switch, located on the front panel, to the off position. The light in the switch will go out when the switch is in the off position.
Pull up on the purge valve toggle to vent the chamber.
Lift and rotate the sputtering gun. CAUTION: Extended coating times at high output currents (over 5 minutes at 150mA or more) may cause heating of the sample and platform. Handle with care.
Return the output control to zero.