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Revision 1 - 10 Sept 2003, James Zhou

Guideline to Access MIRC CMOS Furnaces

CMOS furnaces are basic and critical equipment for fabricating CMOS circuits and integrating CMOS with other micro/nano devices. They are very sensitive to contamination, particularly to metallic ions. They are also complicated tools involving vacuums, high temperatures, toxic and flammable gases, and fragile quartz wares. Therefore, access is restricted to CMOS compatible processes and requires extensive training.

The occasional use of the CMOS furnaces should be handled by the Processing Center because it is much more cost effective to both the MiRC and to users. You may submit your jobs through the website http://cmos.mirc.gatech.edu/services/servreq/.

The following guidelines will get you started in the right direction should you need extensive access to the tools.

1. Contact Dr. Zhou to discuss your device processing plan and obtain approval of access to the CMOS furnaces;
2. Read the related manuals;
3. Participate in a training session on furnace operation (it may last 1-2 weeks);
4. Continue working with qualified users for a reasonable amount of time;
5. Get checked off by the Furnace Trainers.

All general equipment training and use requirements also apply to the CMOS Furnaces.

Also see: Furnace Assignments.