Gasonics Aura 1000 Asher

The Aura 1000 Asher is a microprocessor controlled downstream, or "afterglow", photoresist stripper that will strip the front and backside of a wafer, typically in less than one minute. It is also able to function as a descummer by removing approximately 200-500 angstroms of photoresist. The Asher can also remove a maximum of one micron of photoresist.

Features

• Programmable microprocessor
• Automatic wafer handling
• Infrared heat source for process temperature control
• Downstream processing: No wafer radiation damage
• Soft start vacuum system
• Front and backside resist removal

Operating Instrutions

1. Check to make sure that the system is in idle mode.
2. Display should read idle and the key should be set to Auto.
3. Place your 4" sample or samples inside a wafer boat.(There is currently no holder for smaller samples.)
4. Load the wafer boat onto the left stage.
5. Place an empty wafer boat onto the right stage. The stage should start to lower it self.
6. Press "Recipe No" button.
7. Select Recipe A by pressing A and then enter.
8. Press "Start" to run a recipe and automation.
9. Door will open and load arm will place wafer onto the holder.
10. Door will close.
11. Warm up mode will begin. 60secs.
12. Process will take 60 secs.
13. Door will open and unload arm will place wafer into wafer boat on right stage.
14. Automation will continue until all wafers have been done.