AET addax RX RTP Trainers Rapid thermal processors (RTPs) or rapid thermal annealers (RTAs) are used to rapidly heat a sample for annealing or other purposes. The RTP can heat a sample to 500 °C in as little as five seconds and can heat samples to 1100 °C in as little as 20 seconds. The RTP can heat a sample to temperatures as high as 900 °C using an array of about fifteen high power lamps. The RTP can fill the chamber with nitrogen, oxygen, or forming gas (10% H2 in N2) during the process. This system can handle samples up to four inches in diameter.

Features

• maximum temperature of 1100°C

Operating Instructions

I. Loading the RTP

1. Lift the bar on the chamber door and gently pull the door open. If the chamber is under vacuum, contact Gary Spinner (pager: 404/655-4097).
2. The sample holder is set up for a 4" wafer. If your sample is smaller than this, you may mount it to the 4" wafer that is at the RTP for this purpose. If you can't find the 4" wafer, please contact MiRC staff. Be extremely careful with the quartz wafer holder and the thermocouple wires. Place your sample on the holder. Use a three inch wafer to hold your sample if needed.
3. Lift the bar and carefully close the chamber door. Once the door is closed, push down on the bar to seal the door.

II. Operating the RTP

1. If the system is displaying the AE logo screen, press return.
2. Make sure that Caps Lock is on.
3. You will be prompted for the date, your user ID, and your password. Enter the date in the form DDMMYY (the default value should be okay), then enter your name and password. If you enter this information correctly, the main menu will be displayed.
4. From the main menu, choose 2 (Runs).
5. From the Runs menu, select option 1 (Add new record).
6. You will be prompted for a wafer number. You may use any number you want as long as it has not been saved before. If the number you try to use doesn't work, try another one.
7. For the recipe code, give the name of the recipe you want to run.
8. All other items on this screen do not matter and may be left at their default values, even if those values are wrong. When you get to the bottom of the screen, you will be asked which line you want to change. If you want to change anything, enter the appropriate number. If everything is okay, enter 0 (zero).
9. There will be a few more screens of options after this one. You may accept the default values by pressing enter.
10. After this, you will see a graph of the parameters for the recipe you are about to run. Make sure that the recipe is correct, then press return. Check to see if the readings on the temperature gauge on the screen and on the hand held thermocouple gauge are correct (they should be about room temperature). After a few seconds, you will be able to select 2 (Start). The recipe will run.
11. When the recipe is complete, you will be asked if you want to save the run. Enter "N" (No).
12. If you are not going to perform any more runs at this time, enter 0 (zero) until the AET logo screen is displayed.

I. Unloading the RTP

1. Lift the bar on the chamber door and gently pull the door open. If the chamber is under vacuum, contact Gary Spinner (pager: 404/655-4097).
2. Carefully remove your sample. Be careful. It may be hot.
3. Lift the bar and carefully close the chamber door. Once the door is closed, push down on the bar to seal the door.